Processing Baths and Built-In Components

Processing baths are available for the different rinsing, cleaning and etching processes. The material for the processing baths is selected because of its thermal and chemical resistance. The baths are available in a variety of specifications:

  • Filtration systems
  • Tempering systems (directly / indirectly)
  • Chemical supply systems
  • Substrates moving systems (vertically / horizontally)
  • Resistivity meters
  • Ultrasonics systems
  • Megasonics systems
  • Hinged covers with mechanically or manually opening
  • Covers with cooling and cooling traps

The assembly of the processing baths and their specifications are done individually according to requirements. In addition, extraneous components for processes such as lithography, drying and others can also be integrated.

processing bath with substrate moving (outside) and quick dump rinser (inside)
processing bath with substrate moving (outside) and quick dump rinser (inside)
processing bath with megasonics, chemical supply system, cooling trap and cover with cooling (pneumatically hinged)
processing bath with megasonics, chemical supply system, cooling trap and cover with cooling (pneumatically hinged)
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